Immersion scanner shortage hits Taiwan DRAM firms

TAIPEI: Due to a shortage on ASML's NXT:1950i, some Taiwan-based DRAM manufacturers will not be receiving shipments of the equipment for almost a year. This shortage is hampering their transition beyond 38nm processes, said Industrial Sourcing News, citing sources.

The NXT:1950i is ASML's latest immersion scanner that has been designed to produce 12-inch wafers at the 32nm node and beyond. Earlier reports from industry sources had said that the lead time for ASML's NXT:1950i had been extended to almost 12 months.

The DRAM makers, who had not made advance purchases, have switched to ASML's older-generation XT systems that provide manufacturing down to 38nm.

Stronger companies like Taiwan Semiconductor Manufacturing Company (TSMC), Samsung Electronics and Toshiba had placed orders for the scanners ahead of the DRAM makers. Sources say that these companies would not be experiencing any delays in process transition.

iSuppli had pointed out in its August report that ASML’s inability to supply enough equipment is one of the two issues that potentially might impact DRAM supply in the second half of 2010.