Entegris announces VaporSorb filter

USA: Entegris Inc., a leader in yield-enhancing materials and solutions for highly advanced manufacturing environments, announced a product extension for its VaporSorb line of airborne molecular contamination (AMC) filters.

VaporSorb is a leading brand of filter used in cleanroom environments and for process tools during key steps in semiconductor manufacturing. VaporSorb filters have been engineered to capture airborne organics, bases and strong acids‹all in one filter. The new VaporSorb TRK has added unique material to allow it to become the first single filter to capture not only the top three core contaminant classes, but also the fourth, a group defined as weak acids.

Designed specifically for photolithography coater/developer tracks, the new filter was created as a "four-in-one" filter solution to avoid the complexities of multi-filter handling and to build on the previous "three-in-one" technology. In addition, the filter retains the VaporSorb's industry-leading service life to reduce both tool downtime and cost of ownership.