Axcelis ships multiple system order for 'Purion XE' high energy implanters

BEVERLY, USA: Axcelis Technologies Inc., a leading supplier of enabling ion implantation solutions for the semiconductor industry, has received a multiple system order for the Company's new Purion XE™ single wafer, high energy implanter.

The Purion XE, which is the process tool of record for this customer's high energy requirements, will be installed as part of a capacity expansion at a fab in the Asia Pacific Region, and will be used in high volume production of advanced NAND devices. The systems ship in Q1.

John Aldeborgh, executive VP, customer operations, said: "We are very excited to receive this order from one of the world's premiere suppliers of semiconductor devices. This customer utilizes the Purion XE versus competitive systems because of its exceptionally broad energy range and high beam currents, which translate directly to capital efficiency. As the industry leader in high energy implant, we are well equipped to help meet their needs for additional manufacturing capacity as well as achieve their advanced NAND roadmap goals."