SEMI announces four new standards

SAN JOSE, USA: SEMI has published four new technical standards applicable to the flat panel display (FPD), MEMS and semiconductor manufacturing industries.

The new standards, developed by technical experts from equipment and materials suppliers, device manufacturers and other companies participating in the SEMI International Standards Program, are available for purchase in CD-ROM format or can be downloaded from the SEMI website.

SEMI Standards are published three times a year. The new standards, part of the July 2008 publication cycle, join more than 770 standards that have been published by SEMI during the past 35 years.

“These SEMI Standards represent a continuation of the work undertaken by the volunteers in the SEMI International Standards Program,” said James Amano, Director, SEMI International Standards. “The four new specifications provide critical solutions to manufacturing challenges in the FPD, MEMS and semiconductor industries.”

The full list of SEMI standards being released include:

SEMI D53-0708: Specification for Liquid Crystal Display (LCD) Pellicles

SEMI D52-0708: Specification for Reference Position of Substrate ID

SEMI MS7-0708: Specification for Microfluidic Interfaces to Electronic Device Packages

SEMI T19-0708: Specification for Device Marking