Mattson photoresist systems for Asian foundry

FREMONT, USA: Mattson Technology Inc., a leading supplier of advanced process equipment used to manufacture semiconductors, announced that one of the world's top dedicated semiconductor foundries based in Asia has placed multiple orders for its Suprema photoresist strip system, driving Mattson share gain in the dry strip market.

Mattson noted that its long-term customer accepted an initial Suprema system and placed multiple repeat orders.

Sr. Vice President and General Manager of Mattson Technology's Surface Cleaning Group, Neal Holmlund, said, "The success of Suprema is a testament to the extremely high reliability and throughput of the product, coupled with enabling process performance, maturity and extendibility to future technology nodes.

"We closed the evaluation tool order, as well as the volume repeat order, within 45 days from when the evaluation tool was powered on. The tool was evaluated for HDIS, which is one of the most challenging of dry strip applications, as the crust layer formed by ion implantation is very difficult to remove via traditional downstream ashers."

"The Suprema's advantage is in process and chemistry flexibility, which can be tuned for optimum performance." Holmlund added, "Additionally, the tool was qualified in production for sub 130nm device nodes, and Mattson is further collaborating with this customer on advanced node development at 45nm. We look forward to supporting our customer as they make further advances in their technological capabilities."