Advertisment

Foundry expands deployment of Nova’s optical CD

author-image
CIOL Bureau
Updated On
New Update

REHOVOT, ISRAEL: Nova Measuring Instruments Ltd, a provider of leading edge stand-alone metrology and the market leader of integrated metrology solutions to the semiconductor process control market, announced that it will ship several NovaScan stand-alone metrology systems to a leading global foundry.

Together with already deployed NovaScan systems at the foundry, the additional tools will expand the metrology solution for Back End Of Line (BEOL) Copper interconnect process control at advanced technology nodes. Coupled with NovaMARS, Nova’s 3D Optical CD modeling software, the NovaScan systems can accurately measure the Copper line profile, a dominant factor highly correlated to copper line resistivity.

Commenting on the order, Noam Shintel, Director of Corporate Marketing at Nova said: "At technology nodes of 45nm and below, Optical CD, being able to accurately visualize the Copper line profile, becomes an enabling technology for Copper process control. We are delighted that this technology leading foundry continues to deploy Nova’s stand-alone and integrated metrology tools and we look forward to continue our fruitful cooperation supporting them with our advanced Optical CD solutions in the future."

semicon