ASML’s immersion system gets lead time extension

TAIPEI: A lead time extension for ASML's latest immersion system, the NXT:1950i, - almost 12 months has been extended is prompting some Taiwan-based DRAM makers to switch to alternative products.

Industry sources speculated that Elpida Memory's DRAM partners, who include Powerchip Technology, Rexchip Electronics and ProMOS Technologies, have acquired ASML's older-generation immersion scanners due to the longer wait they would have to engage in if they wanted the new immersion system. Sources say that ASML's XT systems are, on an average, 20 cheaper than the NXT ones, though the former only provides single-exposure manufacturing down to 38nm.

These DRAM makers will still need to upgrade their immersion equipment in order to deliver 30nm-class products, the sources pointed out.

They added that Nanya Technology and Inotera Memories already took delivery of NXT scanners from ASML, which will help them in migrating to 30nm ahead of other Taiwan-based DRAM makers.

According to ASML, they have shipped five NXT systems, and another 17 units in backlog as of December 31, 2009. It landed orders of 15 NXT systems in the second quarter, and had 38 units in backlog at the end of the quarter.